Applications: Wafer Test, AOI, Reflective Surfaces, Scratches, Contamination
idAOI combines a programmable illumination with a high resolution camera. The 65MPixel camera can support both: high resolution in µm range and a large FoV (ca. 10mm). The illumination can switch between dark field and coaxial. Intensity is programmable and provides different wavelengths. Optional water cooling can boost the intensity for short esposure times. Tilt can be adjusted manually and focus can be adjusted automatically with high precision z stage. Software drivers and image analysis libraries, API or complete applications can be provided.
idAOI for high resolution surface inspection